Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam

A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power. The relationship of the displacement of MEMS cantilever beam with the measured microwave power is researched, and the reason that the microwave power consumed by the MEMS cantilever cannot be ignored at low power level is explained. The ratio of microwave power consumed by the MEMS cantilever with the microwave frequency is obtained, and the measured results show that the percentage is 51.96%@8GHz, 52.31%@10GHz and 55.11%@12GHz on the average, respectively. There is an important reference value to achieve the accurate microwave power measurement of the double-channel microwave power sensors.